用于5～6GHz无线局域网的硅螺旋电感设计

提出一种方案和优化电感地图结构的方法.选用低电阻系数硅衬底和0118μmCu/SiO2互连工艺技术,方案出一组工作在517GHz的电感,一同优化了地图结构,例如内部磁芯大小、线圈宽度、线圈间距(012～11nH)等.与使用原有方案方法测出的电感的Q值对比,通过优化的517GHz电感的Q值可改进到5～8.

(A scheme and a method for optimizing the structure of the inductance map are proposed. Using low resistivity silicon substrate and 0118μmCu/SiO2 interconnection process technology, a group of inductances operating at 517GHz is proposed, and the map structure is optimized together, such as the size of the internal magnetic core, Coil width, coil spacing (012 ~ 11nH), etc. Compared with the Q value of the inductance measured by the original method, the Q value of the optimized 517GHz inductance can be improved to 5 ~ 8.)

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