(A scheme and a method for optimizing the structure of the inductance map are proposed. Using low resistivity silicon substrate and 0118μmCu/SiO2 interconnection process technology, a group of inductances operating at 517GHz is proposed, and the map structure is optimized together, such as the size of the internal magnetic core, Coil width, coil spacing (012 ~ 11nH), etc. Compared with the Q value of the inductance measured by the original method, the Q value of the optimized 517GHz inductance can be improved to 5 ~ 8.)
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